温度测量控制工程师

About the role

In this role you will be developing advanced rapid thermal annual temperature control systems to meet the various requirements for advanced semiconductor technology nodes. Develop and modify temperature measurement model, coding, controllers as needed to improve process results. Design experiments, root cause analysis and detailed documentation for technical issues during development and troubleshooting.

职位描述：

随着半导体制造技术的进步，为了满足工艺的要求，本职位需要研发快速热退火设备的温控系统，持续改善现有测温以及温控模型。需要通过实验设计去追寻问题的原因，并且需要详细记录研发数据以及记录对问题的描述和解决方法。

Responsibilities:

• Work with the Research and Design (R&D) center team to develop temperature control models for 300mm/200mm RTP (Rapid Thermal Process) system.

• Develop temperature measurement systems from high to low temperature, detection with difference wafer optical property and robust systems for new annealing, oxidation/nitridation, plasma oxidation/nitridation, application.

• Develop wafer mode for cross wafer tuning and CIP development to meet process requirements.

• Support customers to solve problems related to temperature measurement, process optimization, as long as new product development.

• 1-2 years of overseas training.

职位责任：

1. 协同其他研发团队成员，以及工艺工程师开发300mm/200mm 快速热退火设备温度测量和控制系统。

2. 开发不同温度范围的温度测量，控制系统，能够满足硅氧化膜，氮化膜和多晶硅等不同膜的温度精确测量和控制。

3. 根据工艺要求，研发晶圆不同半径区域内可调节的温度控制系统，以及对现有工艺的持续改善。

4. 1到2年海外技术培训。

Requirements:

• At least MS in Thermodynamics, Optics Engineering in Physics and Engineering. PhD is preferred.

• Quick learner with the ability to grasp things quickly, is passionate about developing new systems.

• Demonstrated research experience, in a technical environment, with strong trouble-shooting skills.

• Excellent English communication skills (verbal, written), data analysis and coding skills.

• Must be able to work independently under pressure in a highly dynamic environment.

• RTP background in research development center is preferred.

职位要求：

1. 物理系热动力学，光学专业，硕士以上学历

2. 有兴趣从事半导体设备研发工作，并且有能力学习技术前沿知识。

3. 具有较强的技术研究能力，数据分析总结能力；具有较强的分析问题解决问题的能力。

4. 较强的英语听说读写能力。

5. 具有较强的工作抗压能力。

6. 具有快速热退火相关知识，相关技术背景者优先。