中微公司
2027届-资深等离子体开发工程师(广州/上海)-大平板设备 Plasma Development Senior Engineer -FPE
岗位职责
我们正在寻找一位积极进取、富有创造力的应届毕业生,以射频与等离子体工程师的身份加入我们团队。在这一岗位中,您将与资深工程师并肩工作,参与等离子体处理系统的开发并协助排查射频相关问题。这是一个将您在等离子体物理和射频工程领域的学术知识应用于半导体及泛半导体行业实际工程挑战中的绝佳机会。 主要职责:
等离子体系统开发: 参与等离子体处理腔室的设计与开发,包括等离子体源、气体输送系统和真空系统。 与机械工程师和电气工程师协作,将等离子体硬件集成到完整的设备架构中。 制定测试方案,以表征不同工艺条件下的等离子体行为,并将硬件设计与均匀性、刻蚀速率、沉积质量等性能指标相关联。
电动力学与等离子体基础: 运用电磁场行为的基础知识,优化功率向等离子体的传输方式。 使用场仿真或分析模型,理解腔室内部的电场/磁场分布,并预测等离子体阻抗。 分析频率、功率和腔室几何结构如何影响电子密度、离子能量、等离子体电位等关键等离子体参数。 Summary: We are seeking a highly motivated and inventive New College Graduate to join our engineering team as an RF & Plasma Engineer. In this entry-level role, you will work alongside senior engineers to develop plasma processing systems and troubleshoot RF-related issues. This is an excellent opportunity to apply your academic knowledge in plasma physics and RF engineering to real-world challenges in the SEMI & pan semiconductor industry. Key Responsibilities Plasma System Development: • Contribute to the design and development of plasma processing chambers, including plasma sources, gas delivery, and vacuum systems. • Work with mechanical and electrical engineers to integrate plasma hardware into complete tool architectures. • Develop test plans to characterize plasma behavior across different process conditions and correlate hardware design with performance metrics like uniformity, etch rate, and deposition quality. Electrodynamics & Plasma Fundamentals: • Apply foundational knowledge of electromagnetic field behavior to optimize how power is delivered to the plasma. • Use field simulations or analytical models to understand E/H field distributions within the chamber and predict plasma impedance. • Analyze how frequency, power, and chamber geometry influence key plasma parameters such as electron density, ion energy, and plasma potential.
任职要求
电气工程、等离子体物理、应用物理、工程物理或相关专业博士学历。 学术研究或课程学习应包含直接涉及等离子体放电、等离子体源或电磁场与介质相互作用的内容。 技术知识: 等离子体物理基础:理解基本等离子体参数(电子密度、温度、德拜长度、等离子体频率)、击穿机制、鞘层及气体放电行为。 电动力学:熟悉麦克斯韦方程组、波传播、阻抗、传输线理论,以及电磁场如何耦合到导电或介电介质。 射频工程(实践):作为电动力学技能集的一部分,需具备匹配网络、S参数及射频测量设备(网络分析仪、示波器、功率计)的相关知识。 诊断技术:接触过等离子体诊断技术(朗缪尔探针、OES、VI探针)者优先。 仿真/建模:具有电磁仿真工具(CST、HFSS、COMSOL)或MATLAB/Python数据分析经验者优先,但非必需。 真空与气路系统:具备真空技术和气体流量控制的基本常识将有所帮助。 软技能: 具备较强的问题解决能力,对探究实验现象背后的物理机制有强烈好奇心。 能够向跨职能团队成员(机械、工艺、软件工程师)清晰传达复杂的技术概念。 具备动手能力和协作精神,愿意学习新工具和新技术。 有良好的文档记录习惯,注重细节。
PhD in Electrical Engineering, Plasma Physics, Applied Physics, Engineering Physics, or a related field. • Academic research or coursework should include direct exposure to plasma discharges, plasma sources, or electromagnetic field interactions with media. Technical Knowledge: • Plasma Physics Fundamentals: Understanding of basic plasma parameters (electron density, temperature, Debye length, plasma frequency), breakdown mechanisms, sheaths, and gas discharge behavior. • Electrodynamics: Familiarity with Maxwell's equations, wave propagation, impedance, transmission line theory, and how electromagnetic fields couple to conductive or dielectric media. • RF Engineering (Practical): Knowledge of matching networks, S-parameters, and RF measurement equipment (network analyzers, oscilloscopes, power meters) is expected as part of the electrodynamics skill set. • Diagnostics: Exposure to plasma diagnostic techniques (Langmuir probes, OES, VI probes) is a plus. • Simulation/Modeling: Experience with electromagnetic simulation tools (CST, HFSS, COMSOL) or MATLAB/Python for data analysis is advantageous but not required. • Vacuum & Gas Systems: Basic familiarity with vacuum technology and gas flow control is helpful. • Soft Skills: • Strong problem-solving skills and a curiosity for understanding the physical mechanisms behind observed phenomena. • Ability to clearly communicate complex technical ideas to cross-functional team members (mechanical, process, software engineers). • Hands-on, collaborative mindset with a willingness to learn new tools and techniques. • Strong documentation habits and attention to detail.
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